Thin-film deposition methods
Introduction to vacuum processing. Physical, Physicochemical and Chemical methods for thin film deposition and surface functionalization. PVD and epitaxial growth. Introduction to thermal CVD. Hot and cold wall reactors. Other CVD methods. Comparison of CVD methods. Process examples: Carbon nanotubes, Silicon oxides (dielectrics, barrier and protective coatings), SOFC materials, Optical coatings.
Introduction. Sputtering, Etching, PE-CVD, Surface Functionalization. Reaction and deposition mechanisms and kinetics in plasma processing. Plasma reactors. Plasma diagnostics. Material’ structure control in Plasma processing. Examples of plasma processes for the deposition of nanostructured thin films and devices: Thin film silicon, Low and High-k dielectrics, Diamond-Like coatings, MEMS, ultra-hard coatings, control of surface energy and biocompatibility.
Thermodymamics of CVD
Introduction. Feasibility of a CVD process. Techniques for equilibrium calculations in CVD systems. Examples of thermodynamic studies of selected CVD systems. Overlay coatings of TiC on carbon steels. Diffusion coatings of Al on iron.
Kinetics of CVD
Introduction. Steps and control type of a CVD heterogeneous reaction. Influence of experimental parameters on the deposition rate. Measurement of the deposition rate. Experimental methods for studying CVD kinetics. Mechanism of CVD processes. Equilibrium controlled processes. Diffusion controlled processes. Examples of simple CVD systems. Deposition and modeling of TiC on carbon steels. Deposition and modeling of Al diffusion coatings on iron.
Interdepartmental Post-Graduate Programs
The Department of Chemical Engineering also participates in the following Interdepartmental Post-graduate Programmes of Studies that lead to the following degrees: Graduate Specialization Degree and PhD:
- "Science and Technology of Polymers"
In this Interdepartmental Programme the following Departments of the University of Patras participate: Departments of Physics, Department of Chemistry, Department of Chemical Engineering and Department of Materials Science and Technology. For additional information those interested should contact the Secretary of the Department of Chemistry at the University of Patras, Tel: +3061-0-997471
- "Environmental Sciences and Engineering"
In this Interdepartmental Programme the following Departments participate: The Department of Chemistry and the Department of Biology of the University of Creta and the Department of Chemical Engineering of the University of Patras. For additional information those interested should contact the Department of Chemistry of the University of Creta, Tel: +3081-0-393679, +3081-0-393628 and +3081-0-238468
- "Applied Molecular Spectroscopy"
In this Interdepartmental Programme participate: The Department of Chemistry of the University of Creta, the Department of Chemistry of the University of Athens, the Department of Chemical Engineering of the University of Patras, the National Research Foundation and the Foundation for Research and Technology. For additional information those interested candidates should contact the Secretary of the Programme, Tel +3081-0-393677